Batch Thermal Process System for 200mm Wafers “VERTRON® Revolution”
Overview
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KOKUSAI ELECTRIC’s “VERTRON® Revolution” is a latest version of proven VERTRON® 200mm Batch Diffusion/LPCVD systems.
Customer would be able to choose optimum VERTRON® system from mass production to many models production in small quantities. Flexible wafer diameter such as 150mm is ready.*VERTRON is a registered trademark of KOKUSAI ELECTRIC CORPORATION.
- Process Applications
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- LP CVD
- Oxidation
- Anneal (High Temp. / Low Temp.)
- Diffusion
Features
- Built on a proven VERTRON® platform with compatibility of wafer process among past models
- Upgraded to new hardware to enable high productivity utilized latest 300mm tools designs
- Larger batch size (175wafers) and small batch size for low height ceiling (100wafers) (Option)
- Atmosphere control is available for oxygen and moisture sensitive process (lower oxygen & H2O concentration) (Option)
- Controllers have been upgraded to latest architecture based systems and it gives better system performance and much low risk of parts supply discontinuation in the future