High Quality & High Performance Thermal Processing System“TSURUGI-C²® ®”
TSURUGI-C²® is a KOKUSAI ELECTRIC’s new thermal processing platform which is most recently developed for advanced devices especially for the ones with high aspect ratio 3D structures requiring high quality, uniform and conformal film deposition with new innovative reactor design and process techniques.
*TSURUGI-C² and logo are registered trademarks of KOKUSAI ELECTRIC CORPORATION.
- Process Applications
- Thin film deposition
- New Innovative reactor design provides thickness uniformity improvement with the least loading effect
- Shortens total deposition time dramatically with improved reaction gas purging efficiency
- Low particle & high speed wafer transfer automation
- High productivity, small footprint