Dry Resist Strip System “Lambda300”
Overview
-
-
Lambda300 achieves damage free plasma process and fast ashing with our original plasma source “Helical Resonator”.
Great reputation have been given from various customers by great productivity and high tool up-time powered by our original high speed wafer transfer system.- Process Applications
-
- Normal Ashing
- HDI Ashing
- Light etching
Features
- Realized high throughput with our original high speed wafer transfer system
- Low plasma damage process and high speed ashing process are achieved with “Herical Resonator” plasma source taken over from proven Lambda series
- Achieved highly uniform temperature control capability within wafer using our original susceptor heater
- Small footprint, high tool up-time
- Process capability: Normal ashing, high dose ashing and light etching