High-productivity Batch Processing System “AdvancedAce®-300”
Overview
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AdvancedAce®-300 is a KOKUSAI ELECTRIC’s latest platform for batch thermal processing of 300mm wafers.
The AA-300 offers high throughput by utilizing advanced technologies in such areas as temperature control, wafer handling automation, reactor purging.*AdvancedAce is a registered trademark of KOKUSAI ELECTRIC CORPORATION.
- Process Applications
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- LP CVD
- Oxidation
- Annealing
Features
- Achieved high productivity: Improved 1.5times(*) larger lot processing in a time (* Compared with previous model)
- Capable of conformal films into deep trench
- Realized high accurate, high quality film deposition in low temperature
- Health check function (Option)